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Electronic Chemicals: Semiconductors, Silicon and IC Process Chemicals

Specialty Chemicals Update Program

Table of Contents

Executive summary 12
Summary 13
United States 17
Europe 17
Mainland China 18
Japan 19
South Korea 19
Taiwan 19
Southeast Asia 19
Introduction 20
Abbreviations 22
Overview of the semiconductor industry 26
World overview 26
Semiconductor markets 26
Semiconductor manufacturing industry 28
Polysilicon and silicon wafer industry 30
Polysilicon 30
Manufacturers 30
Markets 31
Prices 31
Silicon wafers 31
Demand 31
Manufacturers 32
Regional overview 34
North America 34
Industry structure 34
United States 35
Canada and Mexico 36
Industry market trends 36
Europe 39
Industry structure 39
Industry market trends 43
Mainland China 44
Japan 50
Industry structure 50
Industry market trends 50
Electronic products 50
Semiconductors 52
South Korea 54
Taiwan 54
Southeast Asia 55
Overview of the IC process chemicals industry 56
United States 56
Structure of the industry 56
Company profiles 58
CMC Materials, Inc. 58
DuPont Electronics & Imaging 60
EMD Performance Materials 61
Operating characteristics 63
Research and development 63
Manufacturing 64
Marketing 64
Cost structure and profitability 64
Government regulations 64
Trends and opportunities 65
Technology 65
Business 65
Critical factors for success 66
Europe 66
Structure of the industry 66
Company profile—Siltronic AG 68
Operating characteristics 69
Research and development 69
EU research programs 69
Company initiatives 71
Marketing 71
Cost structure and profitability 71
Government regulations 72
REACH 73
Restriction of the Use of Certain Hazardous Substances/Waste Electrical and Electronic Equipment directives 74
Trends and opportunities 75
Critical factors for success 77
Mainland China 78
Structure of the industry 78
Operating characteristics 78
Government regulations 79
Critical factors for success 80
Japan 81
Structure of the industry 81
Company profiles 81
JSR Corporation 82
Shin-Etsu Chemical Company, Ltd. 82
Sumitomo Chemical Co., Ltd. 83
Taiyo Nippon Sanso Corporation 84
Operating characteristics 85
Research and development 85
Manufacturing 86
Marketing 86
Cost structure and profitability 86
Government regulations 87
Trends and opportunities 87
Technology 87
Business 87
Critical factors for success 88
South Korea 88
Taiwan 89
Southeast Asia 89
Semiconductor manufacturing 90
Semiconductor substrates 90
Processing steps 91
Deposition 91
Patterning/photolithography 92
Removal (etching and chemical mechanical planarization) 93
Modification of electrical properties/implantation 93
Technology trends 94
IC process chemicals—product types and functions 96
Polycrystalline silicon 96
Silicon wafers 97
Atmospheric and specialty gases 99
Blanket and carrier gases 99
Etchant and cleaning gases 99
Dopant gases containing group III/V elements 100
Precursors for silicon, tungsten, and titanium compounds 100
Reactants and other semiconductor processes using specialty gases 101
DUV lithography 101
Photoresists 102
Photoresist ancillaries 103
Chemical mechanical planarization (CMP) slurries 104
Wet-processing chemicals 106
Etching 108
Cleaning 109
Purity specifications 109
Thin film metals (metal sputtering) 110
Dielectric materials 111
Low-k dielectric materials 112
High-k dielectric materials/metal gates 112
Copper plating chemicals 113
Markets for IC process chemicals by region 116
United States 116
Summary 116
Silicon 116
Consumption and markets 116
Market participants 117
Price 118
Atmospheric and specialty gases 118
Consumption and markets 118
Market participants 119
Price 120
Photoresists 120
Consumption and markets 120
Market participants 121
Price 122
Photoresist ancillaries 122
Consumption and markets 122
Market participants 123
Price 124
Chemical mechanical planarization (CMP) slurries 124
Consumption and markets 124
Market participants 124
Price 125
Wet-processing chemicals 126
Consumption and markets 126
Market participants 126
Price 127
Thin film metals (metal sputtering) 128
Consumption and markets 128
Market participants 128
Price 129
Low-k dielectric materials 129
Consumption and markets 129
Market participants 129
High-k dielectric materials 130
Consumption and markets 130
Market participants 130
Copper plating chemicals 131
Consumption and markets 131
Market participants 131
Europe 132
Summary 132
Silicon 133
Production, consumption, and markets 133
Market participants 133
Price 137
Atmospheric and specialty gases 137
Consumption and markets 137
Market participants 139
Price 140
Photoresists and ancillary chemicals 140
Consumption and markets 140
Market participants 141
Price 142
Chemical mechanical planarization (CMP) slurries 142
Consumption and markets 142
Market participants 143
Price 144
Wet-processing chemicals 144
Consumption and markets 144
Market participants 145
Price 146
Thin film metals (metal sputtering) 147
Consumption and markets 147
Market participants 147
Price 148
Low-k dielectric materials 148
Consumption and markets 148
Market participants 148
Price 148
High-k dielectric materials 148
Consumption and markets 148
Market participants 148
Copper plating chemicals 149
Consumption and markets 149
Market participants 149
Mainland China 150
Summary 150
Silicon 150
Consumption and markets 150
Market participants 151
Price 153
Atmospheric and specialty gases 154
Consumption and markets 154
Market participants 155
Price 156
Photoresists and photoresist ancillaries 157
Consumption and markets 157
Market participants 158
Price 159
Chemical mechanical planarization (CMP) slurries 159
Consumption and markets 159
Market participants 159
Price 159
Wet-processing chemicals 160
Consumption and markets 160
Market participants 160
Price 161
Thin film metals (metal sputtering) 161
Market participants 162
Price 162
Other materials 162
Japan 162
Summary 162
Silicon 163
Consumption and markets 163
Market participants 166
Price 167
Atmospheric and specialty gases 168
Consumption and markets 168
Market participants 169
Price 170
Photoresists 171
Consumption and markets 171
Market participants 172
Price 173
Photoresist ancillaries 173
Consumption and markets 173
Market participants 173
Chemical mechanical planarization (CMP) slurries and pads 174
Consumption and markets 174
Market participants 174
Price 175
Wet-processing chemicals 175
Consumption and markets 175
Market participants 176
Price 178
Thin film metals (metal sputtering) 179
Consumption and markets 179
Market participants 179
Price 180
Other materials 180
Consumption and markets 180
Market participants 181
Price 182
South Korea 183
Summary 183
Silicon 183
Consumption and markets 183
Market participants 183
Price 184
Atmospheric and specialty gases 184
Consumption and markets 184
Market participants 184
Price 185
Photoresists and ancillary chemicals 185
Consumption and markets 185
Market participants 186
Price 187
Chemical mechanical planarization (CMP) slurries 187
Consumption and markets 187
Market participants 188
Price 188
Wet-processing chemicals 189
Consumption and markets 189
Market participants 189
Price 190
Thin film metals (metal sputtering) 190
Consumption and markets 190
Market participants 190
Price 191
Other materials 191
Consumption and markets 191
Market participants 192
Price 192
Taiwan 193
Summary 193
Silicon 194
Consumption and markets 194
Market participants 194
Price 194
Atmospheric and specialty gases 195
Consumption and markets 195
Market participants 195
Price 195
Photoresists and ancillary chemicals 196
Consumption and markets 196
Market participants 197
Price 198
Chemical mechanical planarization (CMP) slurries 198
Consumption and markets 198
Market participants 198
Price 199
Wet-processing chemicals 199
Consumption and markets 199
Market participants 200
Price 200
Thin film metals (metal sputtering) 201
Consumption and markets 201
Market participants 201
Price 201
Other materials 202
Consumption and markets 202
Market participants 202
Price 203
Southeast Asia 204
Summary 204
Silicon 204
Consumption and markets 204
Market participants 204
Price 205
Atmospheric and specialty gases 205
Consumption and markets 205
Market participants 205
Price 206
Photoresists and ancillary chemicals 206
Consumption and markets 206
Market participants 207
Price 207
Chemical mechanical planarization (CMP) slurries 208
Consumption and markets 208
Market participants 208
Price 209
Wet-processing chemicals 209
Consumption and markets 209
Market participants 209
Price 210
Thin film metals (metal sputtering) 210
Consumption and markets 210
Market participants 210
Price 210
Other materials 211
Consumption and markets 211
Market participants 211
Price 212
Revisions 213
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